Electronic
Semi-conductor Industry
The Standard of Water Quality
The quality of ultra pure water is in accordance with the standard set by
the American Society for Testing and Materials (ASTM ). It also meets the
standard of water quality set by the Chinese Electronics department. (18
MΩ.cm, 15 MΩ.cm, 2 MΩ.cm, 0.5 MΩ.cm)
The requirements for water quality of electronic
semi-conductor industry
Microelectronics industry, extensive, the very large scale integration
needs to wash the semi-manufactured goods, finished product with a large
amount of pure water and ultra pure water. The higher the integrated level
of the integrated circuit is, the higher the requirements for water quality
are. This has put forward stricter requirement to the technology, easy
operation, automatic intensity, continuity and constantly of the ultra
pure water equipment.
Application Occasion:
Semiconductor material and product, printed circuit board and integrated
circuit;
Ultra pure material and ultra purification chemical reagent;
The laboratory;
Surface polishing treatment;
Photoelectric products;
Crystalloid silicon and quartzose goods
Precise and tiny products of other Hi-Tech;
General technology
Raw water tank---- Raw water pump----Multi-medium filter----Active carbon
filter----Precise filter-----High pressure pump ----One stage reverse
osmosis ----PH regulates device ----Middle water tank ----Two stage reverse
osmosis ----Pure water tank ----Pure water pump ---- UV(254nm)----Precise
membrane filter(0.1um)
Raw water tank---- Raw water pump----Multi-medium filter----Active carbon
filter----Precise filter-----High pressure pump-----One stage RO system-----RO
water tank-----RO water pump-----UV(254nm)------Mixed bed ion exchanger------Precise
filter(0.1um)
Two stage RO+EDI
Raw water tank---- Raw water pump----Multi-medium filter----Active carbon
filter----Precise filter-----High pressure pump-----One stage RO system-----
Middle water tank-----Two stage high pressure pump-----Two stage RO system
-----RO water pump-----UV(254nm)------EDI system------EDI water tank-----Pure
water pump------One stage extract mixed bed-------TOC(185nm)------ Two
stage extract mixed bed------ Precise membrane filter(0.1um)
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